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DQ-IBF650 | |
Fabrication surface type | Planar, spherical, co-axis off-axis aspherics, free-form surfaces (optional) |
Fabrication trajectory | Spiral trajectory, raster trajectory labyrinth trajectory (optional) |
Fabrication diamete | 30-650mm |
Fabrication workpiece shape | Circles, ellipses, rectangles arbitrary polygons |
Fabrication materials | K9(BK7),fused silica,ULE,zerodur,Si,SiC,nickel-phosphorus alloy,aluminium alloy,etc. |
Fabrication accuracy | Surface accuracy RMS≤3nm，surface roughness Ra ≤ 2nm |
Machine features | With a variety of diameter ion source devices can be flexibly replaced, suitable for small medium aperturee conventional aspherical surface free-form surface ultra-precision machining |
Equipment configuration | |
Ion source module | 2, 5, 10, 20, 30, 37mm beam diameter RF ion source (more than 40mm can be customized) |
Vacuum pump set | Germany import |
| Basic structure | Three axis vacuum motion system |
Software configuration | |
SLAM | The above processing functions are effectively supported, remote computing functions can be realized in the cloud |
Application field | High-precision lens components, ultra-smooth components,phase-plate |
