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DQ-RM 150 | |
Fabrication surface type | Machining surface type: In addition to conventional aspherical surface, high gradient unconventional optical components can be processed |
Fabrication trajectory | Raster trajectory ,random trajectory (optional) |
Fabrication diameter | 30-150mm |
Fabrication workpiece shape | Circles, ellipses, rectangles arbitrary polygons |
Fabrication materials | K9(BK7),fused silica,ULE,zerodur,Si,SiC,nickel-phosphorus alloy,etc. |
Fabrication accuracy | Surface accuracy RMS≤5nm，surface roughness Ra ≤ 2nm(ultra-smooth Ra ≤ 0.5nm) |
Machine features | The high speed flexibility of the robot arm is combined with the phase deflection test technology to achieve ultra-high processing closed-loop test efficiency, which is suitable for batch processing of small aperture aspherical surfaces single processing of unconventional optical components |
Equipment configuration | |
Polishing wheel module | MRF160,MRF80,MRF50（(Interchangeable with quick change system) |
Optical component quick change system | Repeated positioning accuracy is better than 5μm,suitable for batch processing,it can be used with Satisloh, OptoTech, LuphoScan other devices |
Phase measurement deflectometry system | It can be used in conjunction with a small mechanical arm to realize the function of online processing test |
Software configuration | |
SLAM | The above processing functions are effectively supported, remote computing functions can be realized in the cloud |
Application field | High-precision lens components, ultra-smooth components,phase-plate |
